| Brand name |
Structure |
Chemical@name |
Used |
| T S|0 1 |
 |
Tris(4-methylphenyl)sulfonium- trifluoromethansulfonate |
KrF,ArF-Excimer
Negative type resist
Phot-acid-generater |
| T S|9 1 |
 |
Tris(4-methylphenyl)sulfonium
hexafluorophosphate |
KrF,ArF-Excimer
Negative type resist
Phot-acid-generater |
| M P-triazine |
 |
2-(Methoxyphenyl)-4,6-bis- (trichloromethyl)-s-triazine |
g-line or i-line resist
Phot-acid-generater |
| TFE]triazine |
 |
2-[2-(Furan-2-yl)ethenyl]-4,6-bis(trichloromethyl)-s-triazine |
g-line or i-line resist
Phot-acid-generater |
| TME]triazine |
 |
2-[2-(5-methylfuran-2-yl)ethenyl)
-4,6-bis(trichloromethyl)-s-triazine |
g-line or i-line resist
Phot-acid-generater |
| Dimethoxy-triazine |
 |
2-[2-(3,4-Dimethoxyphenyl)ethenyl]
-4,6-bis(trichloromethyl)-s-triazine |
g-line or i-line resist
Phot-acid-generater |